마이크로 나노소자 연구실
지도교원:박재형
구성원: 교원(교직원) 1명
홈페이지:바로가기
전화번호:031-8005-3613
위치:죽전캠퍼스 제2공학관 4층 마이크로/나노소자연구실 418호실
구성원 소개
연구분야
- Wafer level 패키징
- MEMS(Micro Electro Mechanical Systems) 센서 및 엑츄에이터
- 마이크로 탐침
- 미세유체 시스템을 이용한 바이오 센싱 시스템 연구
- LIDAR용 MEMS mirror
연구내용 및 보유기술
<MEMS mirror>
Chung, S. H., Lee, S. K., Ji, C. H., & Park, J. H. (2019). Vacuum packaged electromagnetic 2D scanning micromirror. Sensors and Actuators A: Physical, 290, 147-155.
Kim, J. H., Jeong, H. S., Lee, S. K., Ji, C. H., & Park, J. H. (2017). Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer. Microsystem Technologies, 23(6), 2075-2085.
Kim, J. H., Jeong, H. S., Lee, S. K., Ji, C. H., & Park, J. H. (2017). Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer. Microsystem Technologies, 23(6), 2075-2085.
<Micro tip>
Kim, C. Y., Nam, K. T., Lee, S. K., & Park, J. H. (2019). Fabrication and Measurement of Microtip Electrode Array Integrated With Self-Aligned Hemispherical Cell Trapping PDMS Template. IEEE Sensors Journal, 19(20), 9105-9112.
Maeng, B. R., Nam, K. T., Lee, S. K., & Park, J. H. (2016). Fabrication and measurement of microtip electrode array with self-aligned integrated dual conductive electrodes. Sensors and Actuators B: Chemical, 237, 1015-1020.
Maeng, B. R., Nam, K. T., Lee, S. K., & Park, J. H. (2016). Fabrication and measurement of microtip electrode array with self-aligned integrated dual conductive electrodes. Sensors and Actuators B: Chemical, 237, 1015-1020.
<미세유체 시스템>
Lee, J. H., Lee, S. K., Kim, J. H., & Park, J. H. (2019). Separation of particles with bacterial size range using the control of sheath flow ratio in spiral microfluidic channel. Sensors and Actuators A: Physical, 286, 211-219.
Nam, Y. H., Lee, S. K., Kim, J. H., & Park, J. H. (2019). PDMS membrane filter with nano-slit array fabricated using three-dimensional silicon mold for the concentration of particles with bacterial size range. Microelectronic Engineering, 215, 111008.
Nam, Y. H., Lee, S. K., Kim, J. H., & Park, J. H. (2019). PDMS membrane filter with nano-slit array fabricated using three-dimensional silicon mold for the concentration of particles with bacterial size range. Microelectronic Engineering, 215, 111008.