보유장비

Thermo gravimetric Analysis

Fri, 02 Jun 2017 11:24:41 +0900

기기세부정보 TGA provides quantitative measurement of mass change in materials associated with transition and thermal degradation. TGA records change in mass from dehydration, decomposition, and oxidation of a sample with time and temperature. Temperature Range - 25 ºC to 1000 ºC Mettler TC-11 Controller 출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/

Thermal/E-Beam Evaporator & Glove Box System

Fri, 02 Jun 2017 11:20:30 +0900

기기세부정보 진공증착기(vacuum evaporator system) processing chamber material: STS304 Number of boat : 2~4Ea Main Substrate Shutter :Automatic operation Boat Power Supply ; 6~12V, Voltage & Current control View port with shutter High Vacuum pump : D/P, Turbo pump or Cryogenic pump Low vacuum pump : Rotary vane pump 글러브박스 Dimension : customer's offer size material : stainless steel 304 front view panel : harden glass, thickness 8~10T golve port : pressure control system for protecting glove vacuum pump : mechanical rotary van pump pumping capacity : by box's dimesion pumping port : NW25KF gas circulation port : NW40KF pressure device :safety relief valve, 7kgf/cm2 출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/

Suface profiler

Fri, 02 Jun 2017 11:18:38 +0900

기기세부정보 Step Height Repeatability : Guaranteed 6 angstrom, 1 sigma Unique Linear Scan Step Detection Feature Scan Length Range : 50um to 55mm Vertical Measurement Range : 524um maximum Stylus Replacement : Exclusive quick-change Stylus Force: Programmable stylus force from 1-15mg 출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/

Step Height Measurement

Fri, 02 Jun 2017 11:16:56 +0900

기기세부정보 Measurement Technique : Stylus profilometry Measurement Capability : Two-dimensional surface profile measurements Sample Viewing : 640 x 480-pixel (1/3in.-format) camera, USB; fixed magnification, 2.6mm FOV (166X with 17in. monitor); optional manual zoom, variable 0.67 to 4.29mm (644X to 100X with 17in. monitor) Stylus Sensor : Low-Inertia Sensor (LIS 3) Stylus Force : 1 to 15mg with LIS 3 sensor; 0.03 to 15mg with N-Lite sensor option Stylus Options : Stylus radius options from 50nm to 25μm; High Aspect Ratio (HAR) tips 10μm x 2μm and 200μm x 20μm Sample Stage : Manual X/Y/Θ, 100 x 100mm X-Y translation, 360° rotation, manual leveling; optional Y auto stage, 100mm (4in.) travel, 1μm repeatability, 0.5μm resolution; optional X-Y auto stage, 150mm (6in.) travel, 1μm repeatability, 0.5μm resolution Computer System : PC with Celeron® or Semprom™ processor (optional Pentium® or Athlon™); optional 17in. flat panel display Software : Dektak software running under Windows XP; Step Detection software (std.); optional Stress Measurement software; optional 3D Vision analysis software; optional Stitching software; optional 3D Mapping software; optional Cantilever Deflection software Vibration Isolation : Optional vibration isolation table; optional table-top vibration isolation system Scan Length Range : 55mm (2.16in.) Data Points Per Scan : 60,000 maximum Max. Sample Thickness : Up to 100mm (4in.), depending on configuration Max. Wafer Size : 150mm (6in.) Step Height Repeatability : 6Å, 1 sigma on 1μm step Vertical Range : 524μm (0.02in.) standard; 1mm (0.039in.) optional Vertical Resolution : 1Å max. (at 6.55μm range) Temperature Range : Between 18 and 24°C (64 to 75°F) Humidity Range : 60% ±20°C, non-condensing (11.5in. W x 20in. D x 20.75in. H) WEIGHT : 34kg (75lbs.) DIMENSIONS : 292mm W x 508mm D x 527mm H Input Voltage : 100 to 120VAC/200 to 240VAC, 50 to 60Hz 출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/

Sputter

Fri, 02 Jun 2017 11:08:55 +0900

기기세부정보 Sputter 출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/

Spin Coater

Fri, 02 Jun 2017 11:07:06 +0900

기기세부정보 Specification (ACE-1020S) Wafer size(Max.): 1/2 ~ 4" diameter Bowl size: 8" Bowl Bowl material: SUS 316 Special DC Motor: Up & Down free Step: 100 step Memory storage: 100 program Rotation Speed: 0 to 50 ~ 8,000 rpm Hold Time: 1~999sec Accuracy: ± 1 R.P.M under acceleration, deceleration free: 3,000 R.P.M/sec Power Input: AC 110V, 220V, 50/60Hz Vacuum Input: -450~-650mmHg (6mm ID / 8mm OD) Display: LCD (Back Light) System Controller: Digital Type (Microprocess) Dimension (W X D X H): 320 X 420 X 180 (200) mm 출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/

Spectral Response Measurement

Fri, 02 Jun 2017 11:04:48 +0900

기기세부정보 Spectral Response Measurement 출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/