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Step Height Measurement
작성자 고분자공학과 김찬호
날짜 2017.06.02
조회수 567

곰 인형기기세부정보

막대사탕<SYSTEM> 

말풍선Measurement Technique : Stylus profilometry 

말풍선Measurement Capability : Two-dimensional surface profile measurements 

말풍선Sample Viewing : 640 x 480-pixel (1/3in.-format) camera, USB; 

말풍선fixed magnification, 2.6mm FOV (166X with 17in. monitor); 

       optional manual zoom, variable 0.67 to 4.29mm 

(644X to 100X with 17in. monitor) 

말풍선Stylus Sensor : Low-Inertia Sensor (LIS 3) 

말풍선Stylus Force : 1 to 15mg with LIS 3 sensor; 

0.03 to 15mg with N-Lite sensor option 

말풍선Stylus Options : Stylus radius options from 50nm to 25μm; 

말풍선High Aspect Ratio (HAR) tips 10μm x 2μm and 200μm x 20μm 

말풍선Sample Stage : Manual X/Y/Θ, 100 x 100mm X-Y translation, 

말풍선360° rotation, manual leveling; 

말풍선optional Y auto stage, 100mm (4in.) travel, 

말풍선1μm repeatability, 0.5μm resolution; 

말풍선optional X-Y auto stage, 150mm (6in.) travel, 

말풍선1μm repeatability, 0.5μm resolution 

말풍선Computer System : PC with Celeron® or Semprom™ processor 

(optional Pentium® or Athlon™); 

말풍선optional 17in. flat panel display 

말풍선Software : Dektak software running under Windows XP; 

말풍선Step Detection software (std.); 

말풍선optional Stress Measurement software; 

말풍선optional 3D Vision analysis software; 

말풍선optional Stitching software; optional 3D Mapping software; 

말풍선optional Cantilever Deflection software 

말풍선Vibration Isolation : Optional vibration isolation table; 

말풍선optional table-top vibration isolation system 


막대사탕<PERFORMANCE>

말풍선Scan Length Range : 55mm (2.16in.) 

말풍선Data Points Per Scan : 60,000 maximum 

말풍선Max. Sample Thickness : Up to 100mm (4in.), depending on configuration 

말풍선Max. Wafer Size : 150mm (6in.) 

말풍선Step Height Repeatability : 6&Aring;, 1 sigma on 1μm step 

말풍선Vertical Range : 524μm (0.02in.) standard; 1mm (0.039in.) optional 

말풍선Vertical Resolution : 1&Aring; max. (at 6.55μm range) 


막대사탕<ENVIRONMENT>

말풍선Temperature Range : Between 18 and 24°C (64 to 75°F) 

말풍선Humidity Range : 60% ±20°C, non-condensing

(11.5in. W x 20in. D x 20.75in. H) 

말풍선WEIGHT : 34kg (75lbs.)

말풍선DIMENSIONS : 292mm W x 508mm D x 527mm H 


막대사탕<POWER REQUIREMENTS>


말풍선Input Voltage : 100 to 120VAC/200 to 240VAC, 50 to 60Hz





출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/

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