기기세부정보
<SYSTEM>
Measurement Technique : Stylus profilometry
Measurement Capability : Two-dimensional surface profile measurements
Sample Viewing : 640 x 480-pixel (1/3in.-format) camera, USB;
fixed magnification, 2.6mm FOV (166X with 17in. monitor);
optional manual zoom, variable 0.67 to 4.29mm
(644X to 100X with 17in. monitor)
Stylus Sensor : Low-Inertia Sensor (LIS 3)
Stylus Force : 1 to 15mg with LIS 3 sensor;
0.03 to 15mg with N-Lite sensor option
Stylus Options : Stylus radius options from 50nm to 25μm;
High Aspect Ratio (HAR) tips 10μm x 2μm and 200μm x 20μm
Sample Stage : Manual X/Y/Θ, 100 x 100mm X-Y translation,
360° rotation, manual leveling;
optional Y auto stage, 100mm (4in.) travel,
1μm repeatability, 0.5μm resolution;
optional X-Y auto stage, 150mm (6in.) travel,
1μm repeatability, 0.5μm resolution
Computer System : PC with Celeron® or Semprom™ processor
(optional Pentium® or Athlon™);
optional 17in. flat panel display
Software : Dektak software running under Windows XP;
Step Detection software (std.);
optional Stress Measurement software;
optional 3D Vision analysis software;
optional Stitching software; optional 3D Mapping software;
optional Cantilever Deflection software
Vibration Isolation : Optional vibration isolation table;
optional table-top vibration isolation system
<PERFORMANCE>
Scan Length Range : 55mm (2.16in.)
Data Points Per Scan : 60,000 maximum
Max. Sample Thickness : Up to 100mm (4in.), depending on configuration
Max. Wafer Size : 150mm (6in.)
Step Height Repeatability : 6Å, 1 sigma on 1μm step
Vertical Range : 524μm (0.02in.) standard; 1mm (0.039in.) optional
Vertical Resolution : 1Å max. (at 6.55μm range)
<ENVIRONMENT>
Temperature Range : Between 18 and 24°C (64 to 75°F)
Humidity Range : 60% ±20°C, non-condensing
(11.5in. W x 20in. D x 20.75in. H)
WEIGHT : 34kg (75lbs.)
DIMENSIONS : 292mm W x 508mm D x 527mm H
<POWER REQUIREMENTS>
Input Voltage : 100 to 120VAC/200 to 240VAC, 50 to 60Hz
출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/