기기세부정보
Step Height Repeatability : Guaranteed 6 angstrom, 1 sigma
Unique Linear Scan
Step Detection Feature
Scan Length Range : 50um to 55mm
Vertical Measurement Range : 524um maximum
Stylus Replacement : Exclusive quick-change
Stylus Force: Programmable stylus force from 1-15mg
출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/
고분자공학전공