고분자공학전공

기기세부정보

진공증착기(vacuum evaporator system) 

processing chamber 

 material: STS304 

 Number of boat : 2~4Ea 

 Main Substrate Shutter :Automatic operation 

 Boat Power Supply ;  6~12V, Voltage & Current control 

 View port with shutter 

 High Vacuum pump : D/P, Turbo pump or Cryogenic pump 

 Low vacuum pump :  Rotary vane pump

글러브박스 

 Dimension : customer's offer size 

 material : stainless steel 304 

 front view panel :  harden glass, thickness 8~10T 

 golve port : pressure control system for protecting glove 

 vacuum pump : mechanical rotary van pump 

 pumping capacity : by box's dimesion 

 pumping port : NW25KF 

 gas circulation port : NW40KF 

 pressure device :safety relief valve, 7kgf/cm2 

출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/