기기세부정보
Specification (ACE-1020S)
Wafer size(Max.): 1/2 ~ 4" diameter
Bowl size: 8" Bowl
Bowl material: SUS 316
Special DC Motor: Up & Down free
Step: 100 step
Memory storage: 100 program
Rotation Speed: 0 to 50 ~ 8,000 rpm
Hold Time: 1~999sec
Accuracy: ± 1 R.P.M under
acceleration, deceleration free: 3,000 R.P.M/sec
Power Input: AC 110V, 220V, 50/60Hz
Vacuum Input: -450~-650mmHg (6mm ID / 8mm OD)
Display: LCD (Back Light)
System Controller: Digital Type (Microprocess)
Dimension (W X D X H): 320 X 420 X 180 (200) mm
출처 : 단국대 광에너지소재연구센터 http://www.cpem.re.kr/